Transferable single-crystal GaN thin films grown on chemical vapor-deposited hexagonal BN sheets
نویسندگان
چکیده
Single-crystal gallium nitride (GaN) layers were directly grown on centimeter-scale hexagonal boron nitride (h-BN). Using chemical vapor deposition (CVD), centimeter-scale h-BN films were synthesized on a single-crystal Ni(111) and readily transferred onto amorphous fused silica supporting substrates that had no epitaxial relationship with GaN. For growing fully coalescent GaN layers on h-BN, the achievement of high-density crystal growths was a critical growth step because the sp2-bonded h-BN layers are known to be free of dangling bonds. Unlike GaN layers grown on a typical heterogeneous sapphire substrate, the morphological and microstructural results strongly suggest a high-density growth feature that is driven by the atomic cliffs inherent in the CVD-grown h-BN layers. More importantly, the GaN layers grown on CVD-grown h-BN exhibited a flat and continuous surface morphology with well-aligned crystal orientations both along the c-axis and in-plane, indicating the characteristics of GaN heteroepitaxy on h-BN. NPG Asia Materials (2017) 9, e410; doi:10.1038/am.2017.118; published online 28 July 2017
منابع مشابه
In situ ellipsometry growth characterization of dual ion beam deposited boron nitride thin films
In situ ellipsometry growth characterization of dual ion beam deposited boron nitride thin films" (2000). Faculty Publications from the Department of Electrical and Computer Engineering. 19. Pure hexagonal h, as well as mixed-phase cubic/hexagonal c/h boron nitride ͑BN͒ thin films were deposited onto ͓001͔ silicon substrates using the dual ion beam deposition technique. The BN thin films were grown...
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